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Emission properties of high-Q silicon nitride photonic crystal ...American Institute of Physics
pubs.aip.org
von M Barth · · Zitiert von: 79 — ... Bernd Löchel,2 and Oliver Benson1. 1Nano-Optics, Institute of Physics, Humboldt-University Berlin, -7, D Berlin,. Germany. 2Application ...
First Results in Patterning of Ultra High Aspect Ratio ...Internet Archive Scholar
scholar.archive.org
von M Bednarzik · Zitiert von: 2 — ... Bernd Loechel. BESSY GmbH, Application Center for MicroengineeringBerlin, Germany. . Abstract. Both ...
Integration of moth-eye structures into a poly ...American Institute of Physics
pubs.aip.org
von T Senn · · Zitiert von: 20 — Bernd Löchel. Bernd Löchel. Helmholtz-Zentrum Berlin für Materialien und Energie GmbH,. Institute for Nanometre Optics and Technology. , ...
Optimization of the fabrication process of ultra thick, high ...jbherzog.com
www.jbherzog.com
von M BEDNARZIK · Zitiert von: 1 — a, BERND LOECHEL a,. HEINZ-ULRICH SCHEUNEMANN a, ALEXANDER FIRSOV a, DIRK HAASE b. aBESSY GmbH, Application Center for Microengineering, Albert-Einstein ...
Surface MicromachiningIOPscience
iopscience.iop.org
von B Loechel · · Zitiert von: 4 — Surface Micromachining. Bernd Loechel1. © Copyright by The Electrochemical ... Citation Bernd Loechel Electrochem. Soc. Interface Download ...
Thick-layer resists for surface micromachiningIOPscience
iopscience.iop.org
von B Loechel · · Zitiert von: 98 — Citation Bernd Loechel J. Micromech. Microeng DOI Download Article PDF. Figures. Skip to each figure in the article.
Replication of sub-100 nm structures using h- and s-PDMS ...CORE
core.ac.uk
von C Huelsen · Zitiert von: 3 — Christoph Huelsen*, Juergen Probst, Bernd Loechel. Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Institute for Nanometer Optics and. Technology.
A new removable resist for high aspect ratio applicationsSpringer
link.springer.com
von M Schirmer · · Zitiert von: 8 — Daniel Schondelmaier Æ Ivo Rudolph Æ Bernd Loechel. A new removable resist for high aspect ratio applications. Received: 31 August Accepted: 20 January ...
Gold-ruby glass in a new light: On the microstructuring of ...Springer Link
link.springer.com
von M Eichelbaum · · Zitiert von: 13 — Bernd Loechel is Head of the Application Center for Microengineering at BESSY in Berlin. He received his Ph.D. from the Institute for Physical Chemistry of ...
A realistic fabrication and design concept for quantum ...National Institutes of Health (.gov)
pubmed.ncbi.nlm.nih.gov
von G Kewes · · Zitiert von: 44 — ... Bernd Löchel , Costanza Toninelli , Oliver Benson. Affiliations. 1 AG Nano-Optik, Institut für Physik, Humboldt-Universität zu Berlin ...
Lab Chip (2012) - RSC PublishingRSC Publishing
pubs.rsc.org
von JP Esquivel · · Zitiert von: 41 — ... Bernd Löchel,c Josep Samitierbde and Neus Sabaté*a. Received 18th May 2011, Accepted 8th September DOI: c1lc20426b. The achievement of a higher ...
New negative-tone photoresists avoid swelling and distortionGale
go.gale.com
von G Gruetzner · · Zitiert von: 2 — BERND LOECHEL received his PhD degree from the Free University of Berlin. He later joined the Fraunhofer Institute in Berlin, where he was responsible for ...
Thermo-optical response of photonic crystal cavities ...National Institutes of Health (.gov)
pubmed.ncbi.nlm.nih.gov
von J Wolters · · Zitiert von: 6 — Bernd Löchel, Oliver Benson. Affiliation. 1 Nano-Optics, Institute of Physics, Humboldt-Universität zu BerlinBerlin ...
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