Bernd Tollkühn und Tim Fühner - Info zur Person

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Authors: Bernd Tollkühn, Tim Fühner , Daniela Matiut, Andreas Erdmann, Armin Semmler, Bernd Küchler, Gabriella Kókai Methodology and practical

Machine Learning for Mask Synthesis and VerificationThe Chinese University of Hong Kong

www.cse.cuhk.edu.hk

von H Yang — Andreas Erdmann, Tim Fuehner, Thomas Schnattinger, and Bernd Tollkuehn. Toward au- tomatic mask and source optimization for optical lithography.

Bernd TollkühnDBLP

dblp.org

List of computer science publications by Bernd Tollkühn Tim Fühner, Andreas Erdmann , Richárd Farkas , Bernd Tollkühn, Gabriella Kókai:

Genetic Algorithms to Improve Mask and Illumination ...Springer

link.springer.com

von T Fühner · · Zitiert von: 29 — Tim Fühner, Andreas Erdmann & Bernd Tollkühn. Department of Computer Science II, University of Erlangen-Nuremberg, Erlangen, Germany.

Bernd Tollkühn - researchr alias

researchr.org

Publications by 'Bernd Tollkühn' ... in Lithographic Imaging SystemsTim Fühner, Andreas Erdmann, Richárd Farkas, Bernd Tollkühn, Gabriella Kókai.

Automatic resist parameter calibration procedure for ...SPIE Digital Library

www.spiedigitallibrary.org

von B Tollkuehn · · Zitiert von: 7 — Bernd Tollkuehn, Max J. Hoepfl, Andreas Erdmann, Stefan Majoni, Marion. Jess, "Automatic resist parameter calibration procedure for lithography. von A Erdmann · · Zitiert von: 15 — Andreas Erdmann, Richard Farkas, Tim Fuehner, Bernd Tollkuehn, Gabriela. Kokai, "Mask and source optimization for lithographic imaging systems," Proc.

Andreas Erdmann
Lisa Roubanova
Friedrich Greitsch

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Vorname "Bernd" (49284)
Name "Tollkühn" (123)

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Bernd Tollkühn und Tim Fühner Person-Info

smartfun.de

Machine Learning for Mask Synthesis and VerificationThe Chinese University of Hong Kong

Bernd TollkühnDBLP

Genetic Algorithms to Improve Mask and Illumination ...Springer

Bernd Tollkühn - researchr alias

Automatic resist parameter calibration procedure for ...SPIE Digital Library

LNCS 3005ecokokohe.shop

Will Darwin's law help us to improve our resist models?SPIE Digital Library

[alife] Book release - Hybrid Evolutionary Algorithms

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