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APS -64th Annual Gaseous Electronics Conference - Event - Multiple...
meetings.aps.org
Authors: Stefan Bienholz (Ruhr University Bochum / AEPT ). Egmont Semmler (Ruhr University Bochum / AEPT ). Peter Awakowicz (Ruhr University Bochum / AEPT ). Capacitively coupled plasmas are widely used in PVD processes over several years. Nowadays mainly DC-Magnetron sputter coaters are commonly used, ...
APS -64th Annual Gaseous Electronics Conference - Event -...
meetings.aps.org
Egmont Semmler (Ruhr University Bochum). Andre Bergner (Ruhr University Bochum). Juergen Mentel (Ruhr University Bochum). Peter Awakowicz (Ruhr University Bochum). High intensity discharge (HID) lamps are used in a broad field of application. A special field of interest is car headlights because of ...
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