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Official Gazette of the United States Patent and Trademark ...google.com

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... Cl Int . Cl.3 G03C ,243,742 RADIATION - SENSITIVE POSITIVELY ACTING MATERIALS Jürgen Hersener , and Alfred Wilhelm , both of Ulm , Fed .

Official Gazette of the United States Patent and Trademark Office:...

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4,243,742 RADIATION-SENSITIVE POSITIVELY ACTING MATERIALS Jürgen Hersener, and Alfred Wilhelm, both of Ulm, Fed. Rep.of Germany, assignors to ...

Scientific and Technical Aerospace Reportsgoogle.com

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ETCHING OF MICROPATTERNS OVER LARGE AREAS USING ELECTRON BEAM TECHNOLOGY Final Report Juergen Hersener and Thomas Ricker Bonn Bundesmin . fuer Forsch . u .

Scientific and Technical Aerospace Reports - Google Books

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... Ulm (West Germany). Forschungsinst. MONOLITHIC INTEGRATED ANALOG SWITCHING ARRAYS Final Report, Apr Erich Baechle, Juergen Hersener, ...

Dokumente zum Namen

Messung der Unterdiffusion mit dem ...Wiley Online Library

onlinelibrary.wiley.com

von J Hersener · — Dr. Jürgen Hersener, AEG-Telefunken AG, Forschungsinstitut UlmUlm/Donau.

MCEE: Vol 13, No 1-4ACM Digital Library

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Reinhard Janssen,; Jürgen Hersener. pp 531–534https://doi.org (91) Metrics. Total Citations0. Export Citations

Auswertung Herren 1.Kreisklasse 2 Gießen Rückrunde ...Gießener SV Tischtennis

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Schauer, Jürgen / Hersener, Kai : 1. Voigts, Eckart / Rinnert, Markus : 1. Möhrig, Thorsten / Bieglmann, Jens. Hofmann, Jürgen / Hersener, Kai : 1. Rinnert, Markus / Hofmann, Marco : 1. Rinnert, Markus / Schauer, Jürgen.

Wissenschaftliche Veröffentlichungen

Reconstruction of topographies from multiple SEM views - ScienceDirect

www.sciencedirect.com

Microelectronic Engineering 13 (1991) Elsevier RECONSTRUCTION OF TOPOGRAPHIES FROM MULTIPLE SEM VIEWS Reinhard JANSSEN and Jürgen HERSENER Daimler-Benz AG Ulm Research Centre Ulm, FR Germany In semiconductor device fabrication the control of individual process steps - such as microlithography and etching - requires the