Joachim Hartjes und Toralf Gruner - Info zur Person

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DE B4 - Projektionsbelichtungsanlage mit einer ...

patents.google.com

... Inventor: Sascha Bleidistel: Joachim Hartjes: Toralf Gruner; Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal ... › patent

WO A3 - Projection exposure tool for microlithography and...

patents.google.com

Inventors, Sascha Bleidistel, Toralf Gruner, Joachim Hartjes, Jochen Hetzler, Markus Schwab, Alexander Wolf. Applicant, Carl Zeiss Smt Gmbh.

Patent applications — Michael Patra

www.michael-patra.de

Michael Patra, Alexander Wolf, Markus Schwab, Toralf Gruner, Joachim Hartjes Radiation source module Filing date: World Intellectual Property Organisation (WIPO): WO A1 WO A1 South Korea: KR A Germany: DE A1 United States of America: US A1 Taiwan: TW A TW A. Michael Patra

Patentanmeldungen — Michael Patra

www.michael-patra.de

Michael Patra, Alexander Wolf, Markus Schwab, Toralf Gruner, Joachim Hartjes Strahlungsquellenmodul Radiation source module Anmeldedatum: Weltpatentorganisation (WIPO): WO A1 WO A1 Südkorea: KR A Deutschland: DE A1 DE A1 DE A1 …

WO A1 - Euv lithography system and method Google...

patents.google.com

Inventors, Alexander Wolf, Joachim Hartjes, Toralf Gruner, Daniel Golde, Hans-Jürgen Mann. Applicant, Carl Zeiss Smt Gmbh. Export Citation, BiBTeX, EndNote, ...

Ohne Titel

patentsgazette.uspto.gov

Toralf Gruner, Aalen-Hofen (DE); Joachim Hartjes, Aalen (DE); Markus Hauf, Ulm (DE); and Gerhard Beurer, Ulm (DE). Assigned to Carl Zeiss SMT GmbH, ... Bjoern Liebaug, Ulm (DE); Moritz Becker, Aalen (DE); Kerstin Hild, Schwaebisch Gmuend (DE); Joachim Hartjes, Aalen (DE); and Simon Haas, Pfaffenhofen an der ... › ht... › h...