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Deformation measurement on specular surfaces by simple means | (2001)...

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Published in: Optical Engineering Volume 40, Issue 10, October Show Author Affiliations. Jurgen H. Massig, Fachhochschule Aalen (Germany) ...

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Deformation measurement on specular surfaces by simple means

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The sensitivity for out-of-plane displacements is 100 nm. Citation Download Citation. Jurgen H. Massig, "Deformation measurement on specular surfaces by simple means," Optical Engineering 40(10), (1 October 2001). http://dx.doi.org Submission: Received ; Accepted. ACCESS THE FULL ARTICLE.

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