Lukas Gerlich und Benjamin Uhlig - Info zur Person

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Lukas GerlichDBLP

dblp.org

Betting Wehring, Raik Hoffmann, Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, ... Betting Wehring, Raik Hoffmann, Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, ...

Christoph LeyensDBLP

dblp.org

— Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, Christoph Leyens — Lukas Gerlich, Malte Czernohorsky, Benjamin Uhlig, Robert Seidel, Tobias Barchewitz, Frank Schlaphof, Lutz Meinshausen, Christoph Leyens ...

IEEE International Interconnect Technology Conference (IITC ...

iitc2021.org

— S7-2. XPS Diffusion Analysis of Ta(N)/Ru Diffusion Barriers for Cobalt Interconnects. Bettina Wehring, Lukas Gerlich, Benjamin Uhlig. › uploads › › IITC20...

2021 IITC ProgramInternational Interconnect Technology Conference

iitc-conference.org

Bettina Wehring, Lukas Gerlich, Benjamin Uhlig Fraunhofer IPMS, Germany. 8:55 am – 9:20 am. S7-3. Exploring W-Cu Hybrid Dual Damascene metallization for ... Bettina Wehring, Lukas Gerlich, Benjamin Uhlig Fraunhofer IPMS, Germany. 8:55 am – 9:20 am. S7-3. Exploring W-Cu Hybrid Dual Damascene metallization for ...

Marcus Wislicenus's research works | Fraunhofer Institute for ...

www.researchgate.net

Bettina Wehring · Lukas Gerlich · Alireza M. Kia; [...] Benjamin Uhlig. We demonstrate the utilization of parallel angle‐resolved X‐ray photoelectron ... Bettina Wehring; Lukas Gerlich · Alireza M. Kia; [...] Benjamin Uhlig. We demonstrate the utilization of parallel angle‐resolved X‐ray photoelectron ... › Mar... › Benj...

Explore Peeref via keywords, DOI, ISSN, title, or researcher ...Peeref

www.peeref.com

Sajjad Esmaeili, Katharina Lilienthal, Nicole Nagy, Lukas Gerlich, Robert Krause, Benjamin Uhlig: MICROELECTRONIC ENGINEERING (2019). Article. Tristate ... Sajjad Esmaeili, Katharina Lilienthal, Nicole Nagy, Lukas Gerlich, Robert Krause, Benjamin Uhlig: MICROELECTRONIC ENGINEERING (2019). Article. Tristate ...

Qucosa - Monarch: Organosilane Downstream Plasma On Ultra Low-k...

monarch.qucosa.de

Jesús Calvo, Philipp Steinke, Marcus Wislicenus, Lukas Gerlich, Robert Seidel, Ellen Clauss, Benjamin Uhlig. Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment. Dokumente und Dateien. Volltext (PDF) MByte - MD5 SHA512; signatur.txt.asc ...

使用平行角分辨XPS分析CMOS金属化沟槽中氮化钽的成分 ...

www.x-mol.com

— Bettina Wehring 1 , Lukas Gerlich 1 , Alireza M. Kia 1 , Marcus Wislicenus 1 , Benjamin Uhlig 1. Affiliation. › paper

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Vorname "Lukas" (21738)
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Lukas Gerlich und Benjamin Uhlig Person-Info