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2014 ECS and SMEQ Joint International MeetingProceedings.com ·
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Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Lars Rebohle,. Matthias Albert, Wolfgang Skorupa, Johann W. Bartha. › ...
IOPscience
iopscience.iop.org
von T Henke · · Zitiert von: 3 — Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films, Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Lars Rebohle, Matthias Albert, ...
Publications - cfaed
cfaed.tu-dresden.de
Reference. Thomas Henke, Martin Knaut, Marion Geidel, Felix Winkler, Matthias Albert, Johann W Bartha, "Atomic layer deposition of tantalum oxide thin films using the precursor tert-butylimido-tris-ethylmethylamido-tantalum and water: Process characteristics and film properties", In …
Publications - cfaed
cfaed.tu-dresden.de
Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Matthias Albert, Johann W Bartha, "Growth of aluminum oxide thin films with enhanced film density by the integration of in situ flash annealing into low-temperature atomic layer deposition", In Surface and Coatings Technology, Elsevier, vol. 309, pp. 600–608,
Silicon Nanowire Path - cfaed
cfaed.tu-dresden.de
Thomas Henke, Martin Knaut, Marion Geidel, Felix Winkler, Matthias Albert, Johann W Bartha, "Atomic layer deposition of tantalum oxide thin films using the precursor tert-butylimido-tris-ethylmethylamido-tantalum and water: Process characteristics and film properties", In Thin Solid Films, Elsevier, [Bibtex & Downloads]
Flash-Enhanced Atomic Layer Deposition - BALD EngineeringBALD Engineering AB
www.blog.baldengineering.com
— Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Lars Rebohle, Matthias Albert, Wolfgang Skorupa and Johann W. Bartha — Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Lars Rebohle, Matthias Albert, Wolfgang Skorupa, Johann W. Bartha. › ...
Altmetric
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Applied Physics Letters, December · · Aarti Singh, Hannes Klumbies, Uwe Schröder, Lars Müller-Meskamp, Marion Geidel, Martin Knaut, ...
Ereztech
ereztech.com
... Marion Geidel, C. Wenzel, Martin Knaut, Matthias Albert, Johann W. Bartha High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD ...
OUCIhttps://ouci.dntb.gov.ua › worksAtomic Layer Deposition of Tantalum-Incorporated Hafnium Dioxide
ouci.dntb.gov.ua
Thomas Henke, Martin Knaut, Marion Geidel, Felix Winkler, Matthias Albert, Johann W. Bartha. https://doi.org j.tsf · , Thin Solid ...
avsconferences.org
www.avsconferences.org
— Marcel Junige, Marion Geidel, Martin Knaut, Matthias Albert, Johann W. Bartha (Technische Universität Dresden, Germany). Atomic layer ...
Growth of aluminum oxide thin films with enhanced INFONAinfona.pl
www.infona.pl
von T Henke · · Zitiert von: 16 — Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Matthias Albert, Johann W. Bartha · Details · Contributors · Fields of science · Bibliography ... › resource
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作者：Thomas Henke ; ; ; Martin Knaut ; ; Christoph Hossbach ; Marion Geidel ; ; Matthias Albert ; Johann W. Bartha ;. 关键词：Aluminum oxide (Al2O3) ... › ...
In situ XPS investigation of the chemical surface composition during...
www.semanticscholar.org
Marion Geidel, Martin Knaut, +1 author Johann Wolfgang Bartha; Published in Semiconductor Conference Dresden 2011; DOI: SCD
Study of VO2 thin film synthesis by atomic layer depositionTypeset.io
typeset.io
Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Matthias Albert, Johann W. Bartha - Show less +3 more ... › papers
Monitoring atomic layer deposition processes in situ and in real-time...
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... author={Marcel Junige and Marion Geidel and Martin Knaut and Matthias Albert and Johann W. Bartha}, journal={2011 Semiconductor Conference Dresden}, ...
[PDF] Flash-Enhanced Atomic Layer Deposition: Basics, ...Semantic Scholar
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... and Principal Studies on the Flash-Enhanced Growth of Thin Films}, author={Thomas Henke and Martin Knaut and Christoph Hossbach and Marion Geidel and ... › ...
OLED compatible water-based nanolaminate encapsulation systems using...
coek.info
Technol A 29 (5) (2011) [8] Aarti Singh, Hannes Klumbies, Uwe Schroeder, Lars Mueller- · Meskamp, Marion Geidel, Martin Knaut, Christoph Hobach,.
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