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Frequency Induced Stiction for MEMS Accelero…
embedded.uni-tuebingen.de
by Ulrich Baehr, Marvin Freier, Matthew Lewis, Markus Linck-Lescanne, Christian Budak, Wolfgang Rosenstiel, and Oliver Bringmann › baehr2020
Frequency Induced Stiction for MEMS Accelero…Universität Tübingen
www.embedded.uni-tuebingen.de
Frequency Induced Stiction for MEMS Accelero…. by Ulrich Baehr, Marvin Freier, Matthew Lewis, Markus Linck-Lescanne, Christian Budak, Wolfgang Rosenstiel, ...
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