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A New Method for Detecting Leaks in Eingebettete SystemeUniversität Tübingen
www.embedded.uni-tuebingen.de
A New Method for Detecting Leaks in MEMS Accelero… at Wafer-Level. by Ulrich Baehr, Marvin Freier, Matthew Lewis, Wolfgang Rosenstiel, and Oliver Bringmann
Frequency Induced Stiction for MEMS Accelero…
embedded.uni-tuebingen.de
by Ulrich Baehr, Marvin Freier, Matthew Lewis, Markus Linck-Lescanne, Christian Budak, Wolfgang Rosenstiel, and Oliver Bringmann › baehr2020
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