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2. DC펄스 스퍼터링 공정 변수가 다층 박막의 광 반사율에 미치는 영향123dok.co › 기타

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[6] Stephan Barth , Hagen Bartzsch, Daniel Glos, Peter Frach, Matthias Gittner, Rainer Labitzke,"Adjustment of plasma properties in magnetron sputtering by ...

DC펄스 스퍼터링 공정 변수가 다층 박막의 광 반사율에 ...kais99.org

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von 정연길 · — Frach, Matthias Gittner, Rainer Labitzke,"Adjustment of plasma properties in magnetron sputtering by pulsed powering in unipolar/bipolar hybrid pulse mode",.

[PDF] Abstracts - PSE Conferenceswww.pse-conferences.net › Downloads › PSE2014_All-Abstracts

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· Hagen Bartzsch, Rainer Labitzke, Stephan Barth, Matthias Gittner, Daniel Glöß, Peter. Frach. Fraunhofer FEP, Dresden, Germany.

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von 정연길 — [6] Stephan Barth , Hagen Bartzsch, Daniel Glos, Peter Frach, Matthias Gittner, Rainer Labitzke,"Adjustment of plasma properties in magnetron sputtering by ...

Effect of process parameter of DC pulsed sputtering on optical ...

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von YG Chung · · Zitiert von: 1 — Stephan Barth , Hagen Bartzsch, Daniel Glos, Peter Frach, Matthias Gittner, Rainer Labitzke,"Adjustment of plasma properties in magnetron sputtering by ... › ar...

Adjustment of plasma properties in magnetron sputtering by pulsed ...www.infona.pl › resource

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Stephan Barth, Hagen Bartzsch, Daniel Glöß, Peter Frach, Matthias Gittner, Rainer Labitzke · Details · Contributors · Fields of science · Bibliography · Quotations ...

Matthias Gittner's research works | Fraunhofer Institute for ...ResearchGate

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Rainer Labitzke. A new method of pulsed powering the magnetron discharge using a pulsed switching of the anode has been developed ...

搜索页_+Pulse+magnetron+sputtering - 中国地质图书馆

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... ß ; Peter Frach ; Matthias Gittner ; Rainer Labitzke. 关键词：Pulse magnetron sputtering ; Sputter deposition ; Plasma properties ; Stress control ; AlN.

[논문]DC펄스 스퍼터링 공정 변수가 다층 박막의 광 반사율에 미치는 ...scienceon.kisti.re.kr › srch › selectPORSrchArticle

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Stephan Barth , Hagen Bartzsch, Daniel Glos, Peter Frach, Matthias Gittner, Rainer Labitzke,"Adjustment of plasma properties in magnetron sputtering by ...

搜索页_+Pulse+magnetron+sputtering - 中国地质图书馆 › auto › search

36.112.18.19

... ß ; Peter Frach ; Matthias Gittner ; Rainer Labitzke. 关键词：Pulse magnetron sputtering ; Sputter deposition ; Plasma properties ; Stress control ; AlN.

通过单极/双极混合脉冲模式下的脉冲功率调节磁控溅射中的 ...x-mol.com

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— Stephan Barth , Hagen Bartzsch , Daniel Glöß , Peter Frach , Matthias Gittner , Rainer Labitzke. A new method of pulsed powering the ...

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