Thomas Laidig und Broeke - Info zur Person

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Contact hole reticle optimization by using interference ...

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von RJ Socha · · Zitiert von: 114 — Fung Chen, Thomas Laidig, et al. Robert John Socha, Douglas J. Van Den Broeke, Stephen D. Hsu, J. Fung. Chen, Thomas L. Laidig, Noel Corcoran, ... von JF Chen · · Zitiert von: 35 — Fung Chen, Thomas Laidig, Kurt Wampler, Roger. Caldwell, Kent Nakagawa, et al. J. Fung Chen, Thomas L. Laidig, Kurt E. Wampler, Roger F. Caldwell, Kent H. › pdf › pdf

Alle Infos zum Namen "Thomas Laidig"

Scattering bar OPC application method for sub-half ...Google Patents

patents.google.com

Thomas Laidig: Kurt E. Wampler: Douglas Van Den Broeke: Jang Fung Chen; Current Assignee. The listed assignees may be inaccurate. Google has not performed a ...

PROCEEDINGS OF SPIESPIE Digital Library

www.spiedigitallibrary.org

von JF Chen · · Zitiert von: 17 — Fung Chen, Douglas Van Den Broeke, Michael Hsu,. Thomas Laidig, Kurt Wampler, et al. J. Fung Chen, Douglas J. Van Den Broeke, Michael Hsu, Thomas L. Laidig ...

Scattering bar opc application method for sub-half wavelength ...

www.google.com.gh

Application filed by Thomas Laidig, Wampler Kurt E, Donglas Van Den Broeke, Jang Fung Chen Priority to US , › patents

Complex 2D pattern lithography at lambda/4 resolution using ...

www.spiedigitallibrary.org

von DJ Van Den Broeke · · Zitiert von: 34 — Douglas Van Den Broeke, J. Fung Chen, Thomas Laidig,. Stephen Hsu, Kurt Wampler, et al. Douglas J. Van Den Broeke, J. Fung Chen, Thomas L. Laidig, ... › Download

Model-based scattering bars implementation for 65nm and ...

www.lens.org

Jun 28, 2005; Authors: Michael Hsu 1 , Doug Van Den Broeke 1 , Thomas Laidig 1 , Kurt E Wampler 1 , Uwe Hollerbach 1 , Robert John Socha 1 , Jang Fung ... › lens › article

Scattering bar OPC application method for sub-half ...

uspto.report

This patent grant is currently assigned to ASML Masktools B.V.. Invention is credited to Jang Fung Chen, Thomas Laidig, Douglas Van Den Broeke, Kurt E. Wampler. › patent › grant

in:(Douglas J. Van Den Broeke) - 江都区全球专利搜索平台

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[Xuelong Shi, Robert J. Socha, Thomas Laidig, Douglas Van Den Broeke] US,CA,San Jose;US,CA,Campbell;US,CA,Point Richmond;US,CA,Sunnyvale; ... › results

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