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LinkedIn: Volker Boegli – Dortmund, Nordrhein-Westfalen, Deutschland ...
Sehen Sie sich das Profil von Volker Boegli auf LinkedIn an. Als weltweit größtes Business-Netzwerk hilft LinkedIn Menschen wie Volker Boegli dabei, Kontakte zu finden, die mit empfohlenen...
LinkedIn: Volker Boegli – Dortmund, Nordrhein-Westfalen, Deutschlandde.linkedin.com › volker-boegli-a12a2020b
Volker Boegli. Senior Principal Engineer at Raith. Metropole Ruhr. Es gibt auf LinkedIn 1 weitere Person, die Volker Boegli heißt. Weitere Mitglieder ...
LinkedIn: Volker Boegli – Senior Principal Engineer – RAITH Group | LinkedInde.linkedin.com › volker-boegli-57b0a553
Sehen Sie sich das Profil von Volker Boegli im größten Business-Netzwerk der Welt an. Im Profil von Volker Boegli sind 6 Jobs angegeben.
Crunchbase
www.crunchbase.com
Volker Boegli Chief Technology Officer. Christian Ohm Chief Financial Officer. Ralf Jede CEO. Unlock even more features with Crunchbase Pro. Start Your Free ...
Business-Profile
patentbuddy: Volker Boegli
APPLIED MATERIALS, INC.
Bücher
AI Chat for scientific PDFs | SciSpace
typeset.io
Demonstration of damage-free mask repair using electron beam-induced processes · Ted Liang,Alan R. Stivers,Michael Penn,Dan Bald,Chetan Sethi,Volker Boegli, ...
Michael Penn | Intel | 7 Publications | 109 CitationsAI Chat for scientific PDFs
typeset.io
Michael Penn 1, Dan Bald 1, Chetan Sethi 1, Volker Boegli, Michael Budach, Klaus Edinger, Petra Spies - Show less +5 more • Institutions (1). In Aug ... Michael Penn 1, Dan Bald 1, Chetan Sethi 1, Volker Boegli, Michael Budach, Klaus Edinger, Petra Spies - Show less +5 more • Institutions (1). In Aug ...
EMLC 2005: 21st European Mask and Lithography Conference ...google.de
books.google.de
... Volker Boegli * et al . Carl - Zeiss SMS GmbH , Jena , Germany ( .com * NaWoTec GmbH , Rossdorf , Germany ( email ...
Official Gazette of the United States Patent and Trademark Office:...
books.google.de
MALAM US 6,259,106 B1 APPARATUS AND METHOD FOR CONTROLLING A BEAM SHAPE Volker Boegli , Berkeley ; Stephen A. Rishton , Hayward , and Lee H. Veneklasen ...
Dokumente zum Namen
Evaluation of e-beam repair for nanoimprint templates, Proceedings of...
www.deepdyve.com
Two essential process steps of the template fabrication chain are inspection and repair. The widely introduced gas assisted e-beam etching and deposition...
AIP.ORG
pubs.aip.org
von EH Anderson · · Zitiert von: 93 — Anderson, Volker Boegli, and Lawrence P. Muray. Lawrence Berkeley National Laboratory, MS , Berkeley, California (Received 9 June 1995; accepted ...
… Technical Information Center (.mil)
apps.dtic.mil
von D Attwood · — the contributions of Volker Boegli and Lawrence Muray in the electron beam lithography tool development, the late. Werner Meyer-Ilse for x ...
Internet Archive Scholar
scholar.archive.org
von EH Anderson · Zitiert von: 166 — the contributions of Volker Boegli and Lawrence Muray in the electron beam lithography tool development, the late. Werner Meyer-Ilse for x-ray microscopy ...
Wissenschaftliche Veröffentlichungen
ScienceDirect.com
www.sciencedirect.com
von S Strähle · · Zitiert von: 11 — Anderson, Volker Boegli, Lawrence Muray. J. Vac. Sci. Technol. B, 13 (1995), p [2]. F. Vasey, D. Prongúê, H. Rothuizen, P. Vettiger. J. Vac. Sci. Technol ...
Veröffentlichungen allgemein
COREhttps://core.ac.uk › pdfPDFElucidating the Growth Mechanisms of Electron Beam Induced Deposition ...
core.ac.uk
von DA Smith · Zitiert von: 3 — Klaus Edinger, Hans Becht, Johannes Bihr, Volker Boegli, Michael Budach,. Thorsten Hofmann, Hans W. P. Koops, Peter Kuschnerus, Jens Oster, Petra Spies, and ...
ResearchGate
www.researchgate.net
Application data of the electron beam based photomask repair tool MeRiT MG · Klaus Edinger · Volker Boegli · Christian Ehrlich · Peter Kuschnerus.
eipbn 2024
eipbn.org
— ... Volker Boegli (Raith GmbH Dortmund). By exploiting the algorithmic description of a metalens pattern and directly translating it into an EBL ...
Volker Boegli
spie.org
SPIE Profile of Volker Boegli, Carl Zeiss SMT GmbH. SPIE Profiles is a networking platform for optics and photonics professionals.
Sonstiges
US A1 - Technique for writing with a raster scanned beam...
patents.google.com
Provided is a technique for generating patterns with a raster scanned beam in a photolithographic system that employs a multiple blank position flash...
Antwerp Hilton, Belgium - ppt download
slideplayer.com
Outline Wednesday Sept 4th, Thursday Sept 5th, Introduction Exposure tools/Immersion lithography Materials Lasers Thursday Sept 5th, Resists I...
A novel electron-beam-based photomask repair tool
www.spiedigitallibrary.org
SPIE Digital Library Proceedings
Appareil et procede pour commander la forme d'un faisceauGoogle Patents
patents.google.com
Volker Boegli: Stephen A. Rishton: Lee H. Veneklasen; Current Assignee. The listed assignees may be inaccurate. Google has not performed a legal analysis and ... Volker Boegli: Stephen A. Rishton: Lee H. Veneklasen; Current Assignee. The listed assignees may be inaccurate. Google has not performed a legal analysis and ...
Method and apparatus for processing a substrate with ...Google Patents
patents.google.com
Non-Patent Citations (1). Title. KLAUS EDINGER,VOLKER BOEGLI, WOLFGANG DEGEL: "Performance results from the Zeiss/NaWoTec MeRit MG electron beam mask repair ... Non-Patent Citations (1). Title. KLAUS EDINGER,VOLKER BOEGLI, WOLFGANG DEGEL: "Performance results from the Zeiss/NaWoTec MeRit MG electron beam mask repair ...
Electron Beam Induced Chemistry Collected from many ...SlidePlayer
slideplayer.com
... Volker Boegli, Michael Budach, Thorsten Hofmann, Hans W.P. Koops, Peter Kuschnerus, Jens Oster, Petra Spies, Bernd Weyrauch, NaWoTec GmbH, Rossdorf Volker Boegli, Michael Budach, Thorsten Hofmann, Hans W.P. Koops, Peter Kuschnerus, Jens Oster, Petra Spies, Bernd Weyrauch, NaWoTec GmbH, Rossdorf ...
RocketReach
rocketreach.co
Volker Boegli, based in North Rhine-Westphalia, Germany, is currently a Senior Principal Engineer at RAITH Group, bringing experience from previous roles at ...
SlidePlayer
slideplayer.com
... Volker Boegli, Michael Budach, Thorsten Hofmann, Hans W.P. Koops, Peter Kuschnerus, Jens Oster, Petra Spies, Bernd Weyrauch, NaWoTec GmbH, Rossdorf ...
Academia.edu
www.academia.edu
ACKNOWLEDGEMENTS The authors would like to acknowledge Volker Boegli for his development of a versatile Raster Graybeam simulator. REFERENCES 1. O. Toublan ...
An OASIS by the sea at BACUS (BACUS Show Report)Gale
go.gale.com
von MD Levenson · — Volker Boegli of NaWoTec GmbH in Rossdorf Germany described a gentle e-beam enhanced chemistry approach to fixing clear and opaque defects. By locally ... von MD Levenson · — Volker Boegli of NaWoTec GmbH in Rossdorf Germany described a gentle e-beam enhanced chemistry approach to fixing clear and opaque defects. By locally ...
CiNiihttps://cir.nii.ac.jp › cridElectron-beam-based photomask repair | CiNii Research
cir.nii.ac.jp
Volker Boegli: NaWoTec GmbH , Rossdorf, Germany. Michael Budach: NaWoTec GmbH , Rossdorf, Germany. Thorsten Hofmann: NaWoTec GmbH , Rossdorf ...
Demonstration of damage-free mask repair using electron ...SPIE Digital Library
www.spiedigitallibrary.org
von T Liang · · Zitiert von: 34 — Volker Boegli, Michael Budach, Klaus Edinger, Petra Spies. Author Affiliations +. Ted Liang,1 Alan R. Stivers,1 Michael Penn,1 Dan Bald,1 Chetan Sethi, von T Liang · · Zitiert von: 34 — Volker Boegli, Michael Budach, Klaus Edinger, Petra Spies. Author Affiliations +. Ted Liang,1 Alan R. Stivers,1 Michael Penn,1 Dan Bald,1 Chetan Sethi,1 ...
Method and apparatus that determines charged particle beam ...USPTO .report
uspto.report
This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to Volker Boegli, Ulrich Hofmann, Stephen A. Rishton, Weidong Wang ... This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to Volker Boegli, Ulrich Hofmann, Stephen A. Rishton, Weidong Wang ...
SPIE Digital Library
www.spiedigitallibrary.org
... Volker Boegli, Nicole Auth, Uli Hofmann. Author Affiliations +. Volker Boegli,1 Nicole Auth,1 Uli Hofmann2 1NaWoTec GmbH (Germany) 2GenISys GmbH (Germany).
Performance results from the Zeiss/NaWoTec MeRit MG ...SPIE Digital Library
www.spiedigitallibrary.org
von K Edinger · · Zitiert von: 5 — ... Volker Boegli, Wolfgang Degel. Author Affiliations +. Klaus Edinger,1Volker Boegli,1 Wolfgang Degel2 1NaWoTec GmbH (Germany) 2Carl Zeiss SMS GmbH (Germany). von K Edinger · · Zitiert von: 5 — ... Volker Boegli, Wolfgang Degel. Author Affiliations +. Klaus Edinger,1Volker Boegli,1 Wolfgang Degel2 1NaWoTec GmbH (Germany) 2Carl Zeiss SMS GmbH (Germany).
SPIEDigitalLibrary.org
www.spiedigitallibrary.org
von T Liang · · Zitiert von: 35 — Volker Boegli, Michael Budach, Klaus Edinger and Petra Spies. NaWoTec GmbH, Rossdorf, Germany. ABSTRACT. In this paper, we present the test results ...
Veripages
veripages.com
Volker Boegli - Berkeley CA Ulrich Hofmann - Castro Valley CA. Assignee: Applied Materials, Inc. - Santa Clara CA. International Classification: H01L US ...
disserCat
Christian Ehrlichl, Klaus Edinger, Volker Boegli, Peter Kuschnerus. Application data of the electron beam based photomask repair tool MeRiT MG// Lectures ...
doczz.com.br
doczz.com.br
Volker Boegli, Hans W.P. Koops, Michael Budach, Klaus Edinger, Ottmar Hoinkis, Bernd Weyrauch, Rainer Becker, Rudolf Schmidt, Alexander Kaya, Andreas ...
tekhnosfera.com
Christian Ehrlichl, Klaus Edinger, Volker Boegli, Peter Kuschnerus. Application data of the electron beam based photomask repair tool MeRiT MG// Lectures ...
Verwandte Suchanfragen zu Volker Boegli
| Ulrich Hofmann Thorsten Hofmann Peter Kuschnerus | Jens Oster Bernd Weyrauch Michael Penn | Dieter Kern Nicole Auth Luca Daly |
Personen Vorname "Volker" (26682) Name "Boegli" (18) |
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