Andreas Frommhold

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Spin-on carbon based on fullerene derivatives as hardmask COREcore.ac.uk › display

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... on fullerene derivatives as hardmask materials for high-aspect-ratio etching. By Andreas Frommhold, Richard Palmer, Alexander Robinson and James Bowen.

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SPIE Profile of Andreas Frommhold, imec. SPIE Profiles is a networking platform for optics and photonics professionals.

Residual stress analysis of all perovskite oxide cantilevers |...

link.springer.com

We have used a method to experimentally determine the curvature of thin film multilayers in all oxide cantilevers. This method is applicable for large defl

Optimization and stability of CD variability in pitch 40 nm contact...

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Show Author Affiliations. Lieve Van Look , IMEC (Belgium) Joost Bekaert, IMEC (Belgium) Andreas Frommhold, IMEC (Belgium). Eric Hendrickx ...

Residual stress analysis of all perovskite oxide cantilevers ...link.springer.com › article

link.springer.com

Andreas Frommhold. The University of Birmingham, School of Chemical Engineering, Edgbaston, Birmingham, B15 2TT, UK. James Bowen.

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Spin-on carbon based on fullerene derivatives as hardmask COREcore.ac.uk › display