Bernd Tollkühn

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SPIE Profile of Bernd Tollkühn, Fraunhofer Institut IISB. SPIE Profiles is a networking platform for optics and photonics professionals.

Genetic Algorithms to Improve Mask and Illumination ...Springer

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von T Fühner · · Zitiert von: 29 — Tim Fühner, Andreas Erdmann & Bernd Tollkühn. Department of Computer Science II, University of Erlangen-Nuremberg, Erlangen, Germany.

Automatic resist parameter calibration procedure for lithography...

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Author(s): Bernd Tollkuehn; Max J. Hoepfl; Andreas Erdmann; Stefan Majoni; Marion Jess

Genetic Algorithms to Improve Mask and Illumination Geometries in...

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This paper proposes the use of a genetic algorithm to optimize mask and illumination geometries in optical projection lithography. A fitness function is...