Günter Ellrott - Wissenschaftliche Veröffentlichungen

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Dose-dependent milling efficiencies of helium and nitrogen ...ScienceDirect.com

www.sciencedirect.com

von G Ellrott · · Zitiert von: 2 — ... overlay panel. Günter Ellrott a c , Shinichi Ogawa b , Munenori Uno a , Yukinori Morita b , Muruganathan Manoharan a , Maria Koleśnik von G Ellrott · · Zitiert von: 2 — ... overlay panel. Günter Ellrott a c , Shinichi Ogawa b , Munenori Uno a , Yukinori Morita b , Muruganathan Manoharan a , Maria Koleśnik- ...

Forschungsbericht - UnivISuni-erlangen.de

univis.uni-erlangen.de

Günter Ellrott, M. Sc. Sijia Feng, M. Sc. Alexander Fuchs, M. Sc. André Hochreiter, M. Sc. Felix Hoffmann, M. Sc. Ole Jäger, M. Sc. Malte Kohring, M. Sc ... Günter Ellrott, M. Sc. Sijia Feng, M. Sc. Alexander Fuchs, M. Sc. André Hochreiter, M. Sc. Felix Hoffmann, M. Sc. Ole Jäger, M. Sc. Malte Kohring, M. Sc ...

Microelectronic Engineering | Vol 249, 15 September 2021ScienceDirect.com

www.sciencedirect.com

Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA. Günter Ellrott, Shinichi Ogawa, Munenori Uno, Yukinori Morita, ... Hiroshi Mizuta. Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA. Günter Ellrott, Shinichi Ogawa, Munenori Uno, Yukinori Morita, ... Hiroshi Mizuta.

Publikationen - Max Planck Institute for the Science of LightMax Planck Institute for the Science of Light

mpl.mpg.de

Günter Ellrott, Paul Beck, Vitaliy Sultanov, Sergej Rothau, Norbert Lindlein, Maria Chekhova, Vojislav Kristic. Advanced Photonics Research 4(10) Günter Ellrott, Paul Beck, Vitaliy Sultanov, Sergej Rothau, Norbert Lindlein, Maria Chekhova, Vojislav Kristic. Advanced Photonics Research 4(10)

Reseach report - UnivISuni-erlangen.de

univis.uni-erlangen.de

Günter Ellrott, M. Sc. Sijia Feng, M. Sc. Alexander Fuchs, M. Sc. André Hochreiter, M. Sc. Felix Hoffmann, M. Sc. Ole Jäger, M. Sc. Sascha Korn, M. Sc ... Günter Ellrott, M. Sc. Sijia Feng, M. Sc. Alexander Fuchs, M. Sc. André Hochreiter, M. Sc. Felix Hoffmann, M. Sc. Ole Jäger, M. Sc. Sascha Korn, M. Sc ...

Forschungsbericht

univis.uni-erlangen.de

Günter Ellrott, M. Sc. Benjamin Hacker, M. Sc. Martin Hauck, M. Sc. Emiliia Khan Malte Kohring, M. Sc. Christian Ott, M. Sc. Matthias Popp, M. Sc. Maximilian Rühl ...

Reseach report

univis.uni-erlangen.de

Günter Ellrott, M. Sc. Benjamin Hacker, M. Sc. Martin Siebert, M. Sc. Master students Stefan Gollwitzer, B. Sc. Erika Hahn, B. Sc. Felix Hoffmann, B. Sc. Tobias Huf ...

Verwandte Suchanfragen zu Günter Ellrott

Norbert Lindlein
Vojislav Krstić
Martin Siebert

Paul Beck
Alexandra Schewski
Stefan Wild

Carmen Appenzeller
Maria Koleśnik-Gray
Benjamin Hacker

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Name "Ellrott" (52)

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Wissenschaftliche Veröffentlichungen Günter Ellrott

Dose-dependent milling efficiencies of helium and nitrogen ...ScienceDirect.com

Forschungsbericht - UnivISuni-erlangen.de

Microelectronic Engineering | Vol 249, 15 September 2021ScienceDirect.com

Publikationen - Max Planck Institute for the Science of LightMax Planck Institute for the Science of Light

Reseach report - UnivISuni-erlangen.de

Forschungsbericht

Reseach report