Lorenz Nedelmann - Veröffentlichungen allgemein

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z - Technische Universität Darmstadt - z - Yumpuwww.yumpu.com › document › view › z-technische-universitat-darmstadt

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· Dr. Lorenz Nedelmann. Andreas Swirschuk. Christina Spanheimer. Mareike Hohmann. Christoph Körber. Shunyi Li. Julia Maibach. Eric Mankel.

High resolution nanoimprint templates for dual damascene: fabrication...

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Lorenz Nedelmann, IMS Chips (Germany) Jordan Owens, ATDF Inc. (United States). Frank Palmieri, Univ. of Texas, Austin (United States) Marcus Pritschow ...

Surface Diffusion | SpringerLink

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The interest in the problem of surface diffusion has been steadily growing over the last fifteen years. This is clearly evident from the increase in the number...

Mask patterning for the 22nm node using a proton multi-beam...

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Joerg Butschke, IMS Chips (Germany) Mathias Irmscher, IMS Chips (Germany) Holger Sailer, IMS Chips (Germany) Lorenz Nedelmann, IMS Chips (Germany).

Submonolayer Nucleation and Growth of Copper on Ni(100)link.springer.com › chapter

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Institut de Physique Expérimentale, Ecole Polytechnique Fédérale de Lausanne, CH-1015, Lausanne, Switzerland. Bert Müller, Lorenz Nedelmann, Bjørn Fischer, ...

Resistless mask structuring using an ion multi-beam projection...

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Line edge roughness (LER) and substrate resist interaction of chemically ... Irmscher; Florian Letzkus; Hans Loeschner; Lorenz Nedelmann; Elmar Platzgummer ...